Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature –Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma–
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/42/i=9S/a=5931/pdf
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