Comparison of Organic and Hydride Group V Precursors in Terms of Surface Kinetics in Wide-Gap Selective Area Metalorganic Vapor Phase Epitaxy
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/42/i=10A/a=L1195/pdf
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Mechanisms of template-assisted selective epitaxy of InAs nanowires on Si;Journal of Applied Physics;2015-04-14
2. Selective Area Metal–Organic Vapor Phase Epitaxy of Nitride Semiconductors for Multicolor Emission;IEEE Journal of Selected Topics in Quantum Electronics;2009-07
3. Kinetic Analysis of InAsP by Metalorganic Vapor Phase Epitaxy Selective Area Growth Technique;Japanese Journal of Applied Physics;2009-04-20
4. Reactor-scale profile of group-V composition of InGaAsP studied by fluid dynamics simulation and in situ analysis of surface kinetics;Journal of Crystal Growth;2008-06
5. Reactor-scale uniformity of selective-area performance in InGaAsP system;Journal of Crystal Growth;2007-01
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