Near Edge X-Ray Absorption Fine Structure Study for Optimization of Hard Diamond-Like Carbon Film Formation with Ar Cluster Ion Beam-Reference-Cited by-同舟云学术

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Near Edge X-Ray Absorption Fine Structure Study for Optimization of Hard Diamond-Like Carbon Film Formation with Ar Cluster Ion Beam

Published:2003-06-30 Issue:Part 1, No. 6B Volume:42 Page:3971-3975
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Kitagawa Teruyuki,Miyauchi Kazuya,Kanda Kazuhiro,Shimizugawa Yutaka,Toyoda Noriaki,Tsubakino Harushige,Matsui Shinji,Matsuo Jiro,Yamada Isao

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/42/i=6S/a=3971/pdf

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent Progress in Cluster Beam Technique;Journal of the Japan Society for Precision Engineering;2016

2. Study of Synchrotron Radiation Near-Edge X-Ray Absorption Fine-Structure of Amorphous Hydrogenated Carbon Films at Various Thicknesses;Journal of Nanomaterials;2015

3. Comprehensive Classification of Near-Edge X-ray Absorption Fine Structure Spectra of Si-Containing Diamond-Like Carbon Thin Films;Japanese Journal of Applied Physics;2013-09-01

4. Refilling and Planarization of Patterned Surface with Amorphous Carbon Films by Using Gas Cluster Ion Beam Assisted Deposition;Japanese Journal of Applied Physics;2010-06-21

5. Gas Cluster Ion Beam Equipment and Applications for Surface Processing;IEEE Transactions on Plasma Science;2008-08

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