Silicon Membrane Mask Blanks for X-Ray and Ion Projection Lithography-Reference-Cited by-同舟云学术

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Silicon Membrane Mask Blanks for X-Ray and Ion Projection Lithography

Published:1990-11-20 Issue:Part 1, No. 11 Volume:29 Page:2605-2609
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Löchel B.,Chlebek J.,Grimm J.,Huber H.-L.,Macioßek A.

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Graphite membrane applied for high-aspect-ratio microstructure fabrication;SPIE Proceedings;2000-07-19

2. Three x-ray mask-making methods applied for LIGA process;SPIE Proceedings;1999-08-25

3. Diamond membrane based x-ray masks;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1992-11

4. Overlay performance of an advanced x-ray stepper (XRS 200);Microelectronic Engineering;1992-03

5. Diamond membranes for x-ray masks;Microelectronic Engineering;1992-03

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