Ion-Beam Modification of Amorphous WO3Film and Its Properties as a High-Contrast Inorganic Ion Resist-Reference-Cited by-同舟云学术

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Ion-Beam Modification of Amorphous WO3Film and Its Properties as a High-Contrast Inorganic Ion Resist

Published:1985-01-20 Issue:Part 1, No. 1 Volume:24 Page:92-94
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Koshida Nobuyoshi,Tomita Osamu

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Statistical analysis of pulsed spark discharges in water: Effects of gap distance, electrode material, and voltage polarity on discharge characteristics;Journal of Vacuum Science & Technology A;2022-07

2. Ion irradiation effects on the optical properties of tungsten oxide films;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2010-10

3. Properties and Characterization of Dielectric Thin Films;Schott Series on Glass and Glass Ceramics;2003

4. Vacuum temperature-dependent ellipsometric studies on WO_3 thin films;Applied Optics;1999-12-01

5. Colouration of tungsten oxide films: A model for optically active coatings;Solar Energy Materials and Solar Cells;1999-05

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