Formation of Thick, Thermally-Stable High-Resistivity-Layers in GaAs by Oxygen Ion Implantation
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 28 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Comparative Study on Planar Type-II Strained-Layer Superlattice Infrared Photodetectors Fabricated by Ion-Implantation;Applied Sciences;2022-06-16
2. Planar strained layer superlattice infrared photodetector using ion implantation;Image Sensing Technologies: Materials, Devices, Systems, and Applications IX;2022-05-30
3. Demonstration of Planar Type-II Superlattice-Based Photodetectors Using Silicon Ion-Implantation;Photonics;2020-09-03
4. Planar nBn type-II superlattice mid-wavelength infrared photodetectors using zinc ion-implantation;Applied Physics Letters;2020-06-01
5. Arsenic antisite and oxygen incorporation trends in GaAs grown by water-mediated close-spaced vapor transport;Journal of Applied Physics;2017-03-07
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