In Situ Self Ion Beam Annealing of Damage in Si during High Energy (0.53 MeV–2.56 MeV) As+Ion Implantation

Author:

Nakata Jyoji,Takahashi Mitsutoshi,Kajiyama Kenji

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 54 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Local structures of phosphorus atoms implanted in crystalline diamond;Journal of Applied Physics;2022-10-28

2. The RBS analysis for a thin amorphous Si layer formed on clean and H-terminated Si(0 0 1) surfaces followed by medium-energy IBIEC treatments;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-07

3. Annealing of preexisting defects in silicon single crystals by ion irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-07

4. Epitaxial growth of a deposited amorphous Si layer formed on hydrogen-terminated Si(001) surfaces by ion beam induced epitaxial crystallization combined with ion beam mixing;Japanese Journal of Applied Physics;2019-02-04

5. Solid-Phase Epitaxy;Handbook of Crystal Growth;2015

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