Room Temperature Nanoimprint Technology Using Hydrogen Silsequioxane (HSQ)-Reference-Cited by-同舟云学术

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Room Temperature Nanoimprint Technology Using Hydrogen Silsequioxane (HSQ)

Published:2002-06-30 Issue:Part 1, No. 6B Volume:41 Page:4198-4202
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Igaku Yutaka,Matsui Shinji,Ishigaki Hiroyuki,Fujita Jun-ichi,Ishida Masahiko,Ochiai Yukinori,Namatsu Hideo,Komuro Masanori,Hiroshima Hiroshi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/41/i=6S/a=4198/pdf

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