An Open-Cavity Electron Cyclotron Resonance Plasma/Ion Source
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Published:1999-12-15
Issue:Part 1, No. 12A
Volume:38
Page:6902-6907
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Ning Fung-Truen,Hu Yuan,Lin Tsang-Lang
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering