The Effect of Al/Pt Interface Reaction on Lead-zirconate-titanate Capacitor and the Optimization of Via Contact for Double Metal Ferroelectric RAM-Reference-Cited by-同舟云学术

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The Effect of Al/Pt Interface Reaction on Lead-zirconate-titanate Capacitor and the Optimization of Via Contact for Double Metal Ferroelectric RAM

Published:1998-03-30 Issue:Part 1, No. 3B Volume:37 Page:1332-1335
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Hwang Yoo-Sang,Lee Jin-Woo,Lee Sung-Yung,Koo Bon-Jae,Jung Dong-Jin,Chun Yoon-Soo,Lee Mi-Hyang,Shin Dong-Won,Shin Soo-Ho,Lee Sang-Eun,Kim Byung-Hee,Kang Nam-Soo,Kim Ki-Nam

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Structural Phase Transformations in Al/Pt Bilayer Thin Films during the Solid-State Reaction;Physics of the Solid State;2018-07

2. Chemical and Biological Systems: Chemical Sensing Systems for Liquids;Reference Module in Materials Science and Materials Engineering;2016

3. NITROGEN-RICH TITANIUM NITRIDE SERVING as Pt-Al DIFFUSION BARRIER FOR FeRAM APPLICATION;Integrated Ferroelectrics;2008-06-10

4. Chemical Sensors;Comprehensive Microsystems;2008

5. Nanoporous Alumina Template with In Situ Barrier Oxide Removal, Synthesized from a Multilayer Thin Film Precursor;Journal of The Electrochemical Society;2005

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