The Vapor Phase Deposition of Fluorocarbon Films for the Prevention of In-Use Stiction in Micromirrors-Reference-Cited by-同舟云学术

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The Vapor Phase Deposition of Fluorocarbon Films for the Prevention of In-Use Stiction in Micromirrors

Published:1998-12-30 Issue:Part 1, No. 12B Volume:37 Page:7058-7063
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Park Jin-Goo,Kwon Myong-Jong,Lee Sang-Ho,Lee Kang-Kuk,Kim Yong-Kweon,Shin Hyung-Jae

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Surface characterization of plasma-modified resist patterns by ToF-SIMS analysis;Applied Surface Science;2009-12

2. In Situ Characterization of Induced Stiction in a MEMS;Journal of Microelectromechanical Systems;2007-04

3. A New Surface Modification Method to Prevent the Release-Stiction of Micromechanical Structures during HF Vapor-Phase Etching;Japanese Journal of Applied Physics;2004-09-09

4. Chemical, optical and tribological characterization of perfluoropolymer films as an anti-stiction layer in micro-mirror arrays;Thin Solid Films;2000-12

5. Determination of Optical Properties of Fluorocarbon Polymer Thin Films by a Variable Angle Spectroscopic Ellipsometry;MRS Proceedings;1999

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