Author:
Iida Shoji,Nakamura Tomomi,Ashimura Yoshimichi,Shindo Tomohiro
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
4 articles.
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1. Thin Ag film formation onto Si/SiO2 substrate;Applied Surface Science;2000-10
2. Interface structure analysis of Si/(H)/Ag system;Applied Surface Science;1998-01
3. Effects of accelerated ion beam deposition to form thin metal films on silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-01
4. Thin Ag film formation on thin SOI substrate;2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497)