X-Ray Projection Lithography Using a Fresnel Zone Plate
-
Published:1995-12-30
Issue:Part 1, No. 12B
Volume:34
Page:6748-6753
-
ISSN:0021-4922
-
Container-title:Japanese Journal of Applied Physics
-
language:en
-
Short-container-title:Jpn. J. Appl. Phys.
Author:
Koyama Naoe,Tsuyuzaki Haruo,Kuroda Kenichi,Shibayama Akinori
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. ZONE PLATES;Vacuum Ultraviolet Spectroscopy;2000
2. 15. Zone Plates;Experimental Methods in the Physical Sciences;1998