Application of Mark Detection Using the Vibration Method to an Electron Beam Exposure System
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Published:1995-02-15
Issue:Part 1, No. 2A
Volume:34
Page:655-660
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Takamoto Kiichi,Shimazu Nobuo
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering