Plasma Deposition of Diamond-Like Carbon
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference59 articles.
1. Surface reaction kinetics of gas‐phase diamond growth
2. High quality, large surface area, homoepitaxial MPACVD diamond growth
3. Temperature dependence of the growth rate for nanocrystalline diamond films deposited from an Ar/CH4 microwave plasma
4. Subplantation model for film growth from hyperthermal species: Application to diamond
5. Deposition mechanisms for promoting sp3 bonding in diamond-like carbon
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