Annealing Effects on Cathodoluminescence Properties of SiOxFilms Deposited by Radio Frequency Sputtering
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference14 articles.
1. Electroluminescence from Si quantum dots/SiO2 multilayers with ultrathin oxide layers due to bipolar injection
2. Electroluminescence of as-sputtered silicon-rich SiOx films
3. Theory of amorphous SiO2andSiOx. III. Electronic structures ofSiOx
4. Optical properties of Si clusters and Si nanocrystallites in high-temperature annealed SiOx films
5. Thermal decomposition and new luminescence bands in wet, dry, and additional oxygen implanted silica layers
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