Dislocation Revelation from ($000\bar{1}$) Carbon-face of 4H-SiC by Using Vaporized KOH at High Temperature
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/5/i=7/a=075601/pdf
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Advances and challenges in 4H silicon carbide: defects and impurities;Physica Scripta;2024-08-01
2. Anisotropic etching mechanisms of 4H-SiC: Experimental and first-principles insights;Journal of Semiconductors;2024-01-01
3. Dislocations in 4H silicon carbide;Journal of Physics D: Applied Physics;2022-09-23
4. Etch pit formation on β-Ga2O3 by molten KOH+NaOH and hot H3PO4 and their correlation with dislocations;Journal of Alloys and Compounds;2022-07
5. Contribution of Dislocations in SiC Seed Crystals on the Melt-Back Process in SiC Solution Growth;Materials;2022-02-27
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