Author:
Lee Don-Hee,Park Chil-Keun,Song Ki-Chang,Jeon Young-Sam,Lee Tae Ho,Jeong Chang Young,Ahn Jinho
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
1 articles.
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1. Properties of sputtered TaReGe used as an x-ray mask absorber material;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-11