Interfacial Abruptness in Si/SiGe Heteroepitaxy Grown by Ultrahigh Vacuum Chemical Vapor Deposition
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Published:1997-09-15
Issue:Part 1, No. 9A
Volume:36
Page:5680-5687
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Tsai Wen-Chung,Chang Chun-Yen,Jung Tz-Guei,Chang Ting-Chang,Lin Horng-Chih,Chen Liang-Po
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering