Study of Ion-Induced Secondary Photon Emission in Reactive Ion Etching Experiment
-
Published:1997-07-30
Issue:Part 1, No. 7B
Volume:36
Page:4675-4681
-
ISSN:0021-4922
-
Container-title:Japanese Journal of Applied Physics
-
language:en
-
Short-container-title:Jpn. J. Appl. Phys.
Author:
Moshkalyov Stanislav A.,Machida Munemasa,Campos Delton O.
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering