Charging Damages to Gate Oxides in a HeliconO2Plasma
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Published:1997-12-15
Issue:Part 1, No. 12A
Volume:36
Page:7362-7366
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Lin Wendy,Kang Tzong-Kuei,Perng Yean-Chyi,Dai Bau-Tong,Cheng Huang-Chung
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
1 articles.
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