The Effect of Down-Flow Cleaning Process on Materials Used in an Electron Beam System-Reference-Cited by-同舟云学术

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The Effect of Down-Flow Cleaning Process on Materials Used in an Electron Beam System

Published:1997-12-30 Issue:Part 1, No. 12B Volume:36 Page:7560-7563
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Shimomura Naoharu,Ogasawara Munehiro,Ohtoshi Kenji,Yamasaki Satoshi,Fukudome Yuji,Hirano Ryoichi,Tamamushi Shuichi,Tojo Toru,Takigawa Tadahiro

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Point Defects Observed in D-T neutron irradiated Copper, Silver and Gold at 288 K with a Rotating Target in FNS_JAERI;MRS Proceedings;2000

2. Advanced electron-beam writing system EX-11 for next-generation mask fabrication;SPIE Proceedings;1999-08-25

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