Ultraviolet Nano Imprint Lithography Using Fluorinated Silicon-Based Resist Materials
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/3/i=2/a=025203/pdf
Reference17 articles.
1. A Decade of Step and Flash Imprint Lithography
2. Nanomold Fabrication and Nanoimprint Devices Using Advanced Blu-ray Disc Technology
3. Seamless Pattern Fabrication of Large-Area Nanostructures Using Ultraviolet Nanoimprint Lithography
4. Application of Nanoimprint Lithography to Fabrication of Distributed Feedback Laser Diodes
5. Design and Fabrication of Structural Color Filters with Polymer-Based Guided-Mode Resonant Gratings by Nanoimprint Lithography
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