Highly Reliable Piezoelectric Actuator for Precision Stage System-Reference-Cited by-同舟云学术

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Highly Reliable Piezoelectric Actuator for Precision Stage System

Published:2005-05-10 Issue:5A Volume:44 Page:3307-3312
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Hashiguchi Hiroyuki,Egashira Yoshiya,Furukawa Hiroyuki,Endo Taishi,Kosaka Tetsuya,Kosaka Koji,Uozumi Kiyohiko,Watanabe Masayuki,Yamakawa Takahiro,Miyata Noboru,Nakada Akira,Kubota Hiroshi,Ohmi Tadahiro

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Two-Phase Piezoelectric Motor Using a Multiple-Tube Structure Actuator;Japanese Journal of Applied Physics;2009-09-24

2. Static and dynamic analysis of a four-tube piezoelectric actuator;Review of Scientific Instruments;2009-06

3. Study of Scattering by Surface Acoustic Wave Motor Slider Using Finite Element Method Simulation;Japanese Journal of Applied Physics;2007-07-26

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