Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithography Source Driven by DifferentdI/dtDischarge Current Pulses-Reference-Cited by-同舟云学术

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Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithography Source Driven by DifferentdI/dtDischarge Current Pulses

Published:2005-12-08 Issue:12 Volume:44 Page:8640-8645
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Song Inho,Iwata Kazuhiro,Homma Yusuke,Mohanty Smruti Ranjan,Watanabe Masato,Kawamura Toru,Okino Akitoshi,Yasuoka Koichi,Horioka Kazuhiko,Hotta Eiki

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Generation of collimated extreme ultraviolet radiation by single-photon process;Optics Communications;2023-10

3. Development of a 1.5 kV, 1.2 kA Pulsed-Power Supply for Light Sintering;IEEE Transactions on Plasma Science;2017-10

4. Effect of the rate of rise in discharge current on the output of a 46.9-nm soft X-ray laser based on capillary discharge;Applied Physics B;2016-06

5. Pulsed current wave shaping with a transmission line by utilizing superposition of a forward and a backward voltage wave for fast capillary Z-pinch discharge;Review of Scientific Instruments;2010-04

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