Deposition of AlN Thin Films with Cubic Crystal Structures on Silicon Substrates at Room Temperature-Reference-Cited by-同舟云学术

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Deposition of AlN Thin Films with Cubic Crystal Structures on Silicon Substrates at Room Temperature

Published:2000-05-01 Issue:Part 2, No. 5A Volume:39 Page:L423-L425
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ren Zhong-Min,Lu Yong-Feng,Goh Yeow-Whatt,Chong Tow-Chong,Ng Mei-Ling,Wang Jian-Ping,Cheong Boon-Aik,Liew Yun-Fook

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A simulation study of dual laser beam separation technology for thick transparent inorganic materials;Materials & Design;2017-10

2. Deposition and current conduction of mixed hexagonal and cubic phases of AlN/p-Si films prepared by vacuum arc discharge: Effect of deposition temperature;Thin Solid Films;2014-07

3. Analysis of the local atomic structure of aluminum nitride nanoparticles;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2009-06

4. AlN:Cr thin films synthesized by pulsed laser deposition: Studies by X-ray diffraction and spectroscopic ellipsometry;Applied Surface Science;2009-03

5. ALN nanoparticles XANES analysis: Local atomic and electronic structure;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2007-05

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