Author:
Tamura Masao,Sugita Yoshimitsu
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
12 articles.
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4. Anomalies of antimony distribution within thin N/N+ epitaxial layers of silicon;Surface Technology;1979-12
5. Transition regions in epitaxial films;Physica Status Solidi (a);1977-11-16