EL2 Out-Diffusion in Thermally Annealed Liquid-Encapsulated Czochralski GaAs
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Published:1993-11-15
Issue:Part 1, No. 11A
Volume:32
Page:5059-5061
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Ogata Junzo,Iwai Akiyoshi,Chichibu Shigefusa,Matsumoto Satoru
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering