Stress in Thin Micro-Zone-Molten Crystalline Silicon Films on Solid Substrates
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Published:1993-07-15
Issue:Part 1, No. 7
Volume:32
Page:3217-3226
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Mertens Paul W.,Maes Herman E.
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering