Mechanism of Leakage Current Reduction by Adding WO3 to Crystallized Ta2O5
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Published:2001-06-15
Issue:Part 2, No. 6B
Volume:40
Page:L625-L627
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Manabe Kenzo,Kobayashi Kenji,Fujieda Shinji,Tatsumi Toru
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering