Observation of Micro-Oxygen Precipitates in the Vicinity of the Oxidation-Induced Stacking Fault Ring and Their Effects on Thin Gate Oxide Breakdown-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Observation of Micro-Oxygen Precipitates in the Vicinity of the Oxidation-Induced Stacking Fault Ring and Their Effects on Thin Gate Oxide Breakdown

Published:2001-12-01 Issue:Part 2, No. 12A Volume:40 Page:L1286-L1289
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Kim Hyun-Soo,Lee Ki-Sang,Lee Bo-Young,Yoo Hak-Do,Pyi Seung-Ho,Koh Chung-Geun,Hong Byung-Sub,Kim Yil-Wook

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of Oxygen Precipitation in Silicon Wafer on Electrical Characteristics of Fully Ion-Implanted n-Type PERT Solar Cells;ECS Journal of Solid State Science and Technology;2019

2. A novel approach for suppression of oxygen precipitation in CZ silicon wafers of solar cells by pre-thermal treatment;AIP Conference Proceedings;2018

3. Peptide Separation through a CB[8]-Mediated Supramolecular Trap-and-Release Process;Langmuir;2010-12-31

4. A Systems Approach to Controlling Supramolecular Architecture and Emergent Solution Properties via Host−Guest Complexation in Water;Journal of the American Chemical Society;2010-10-14

5. Atomic Layer Control for Suppressing Extrinsic Defects in Ultrathin SiON Gate Insulator of Advanced Complementary Metal–Oxide–Semiconductor Field-Effect Transistors;Japanese Journal of Applied Physics;2010-04-20

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP