Data Averaging Effect on Roughness Measurement using Phase-Shifting Interferometry for a Few-Ten-Angstrom and Sub-Angstrom Rough Surfaces
-
Published:2001-07-15
Issue:Part 1, No. 7
Volume:40
Page:4736-4740
-
ISSN:0021-4922
-
Container-title:Japanese Journal of Applied Physics
-
language:en
-
Short-container-title:Jpn. J. Appl. Phys.
Author:
Jo Min-Sik,Oh Moon-Su
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering