Hole-Mobility and Drive-Current Enhancement in Ge-Rich Strained Silicon–Germanium Wire Tri-Gate Metal–Oxide–Semiconductor Field-Effect Transistors with Nickel-Germanosilicide Metal Source and Drain
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/3/i=12/a=124201/pdf
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1. Carrier-Transport-Enhanced Channel CMOS for Improved Power Consumption and Performance
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1. Strain Evaluation of Laser-Annealed SiGe Thin Layers;ECS Transactions;2018-07-20
2. Local anisotropic strain evaluation in thin Ge epitaxial film using SiGe stressor template grown on Ge substrate by selective ion implantation;Japanese Journal of Applied Physics;2017-10-24
3. Pattern-dependent anisotropic stress evaluation in SiGe epitaxially grown on a Si substrate with selective Ar+ion implantation using oil-immersion Raman spectroscopy;Japanese Journal of Applied Physics;2017-04-03
4. Origin of additional broad peaks in Raman spectra from thin germanium-rich silicon–germanium films;Applied Physics Express;2016-06-01
5. Ge Condensation and Its Device Application;Photonics and Electronics with Germanium;2015-05-08
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