Oxygen-Doped Si Epitaxial Film (OXSEF)

Author:

Tabe Michiharu,Takahashi Mitsutoshi,Sakakibara Yutaka

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 26 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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3. Electronic properties of partially crystalline SiOx suboxide films;IEEE Electron Device Letters;2000-12

4. Electron counting by a double cylindrical open counter in mixtures of N2 and inert gases of various concentrations;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1999-02

5. Electrical and optical properties of semi-insulating polycrystalline silicon thin films: the role of microstructure and doping;Materials Science and Engineering: R: Reports;1996-12-15

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