Calibration Method for Displacement Characteristics of Tube Scanners in Scanning Probe Microscopy using Coupled-Cavity Laser Diode Sensor
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Feedforward correction of nonlinearities in piezoelectric scanner constructions and its experimental verification;Review of Scientific Instruments;2007-05
2. Orthogonality Correction of Planar Sample Scanner for Atomic Force Microscope;Japanese Journal of Applied Physics;2006-03-24
3. A low temperature ultrahigh vaccum scanning force microscope;Review of Scientific Instruments;1999-09
4. Effect of lubricant coating on tips in atomic force microscopy;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-01
5. A method for contact‐free calibration of piezoelectrical actuators;Review of Scientific Instruments;1995-09
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