Preparation ofPb(Zr,Ti)O3Thin Films by Multitarget Sputtering-Reference-Cited by-同舟云学术

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Preparation ofPb(Zr,Ti)O3Thin Films by Multitarget Sputtering

Published:1994-09-30 Issue:Part 1, No. 9B Volume:33 Page:5244-5248
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Hase Takashi,Hirata Kazuo,Amanuma Kazushi,Hosokawa Naokichi,Miyasaka Yoichi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Pulsed Laser Deposition of Epitaxial Non-Doped PbTiO3 Thin Films from PbO–TiO2 Mosaic Targets;Coatings;2021-05-31

2. Combinatorial study of the phase development of sputtered Pb(Zr,Ti)O3 films;Japanese Journal of Applied Physics;2020-09-17

3. Effect of cerium oxide addition on optical, electrical and dielectric characteristics of (Bi0.5Na0.5)TiO3 ceramics;Journal of Physics: Materials;2018-09-18

4. The Effect of Ar/O2Partial Pressure Ratio on the Ferroelectric Properties of (Pb0.92La0.08)(Zr0.65Ti0.35)O3Thin Films Deposited by RF Magnetron Sputtering Method;Journal of the Korean Vacuum Society;2009-03-31

5. Influence of Pre-Oxidation of an Ir Film on Chemical Composition and Crystal Property of a PZT Film Deposited on the Ir Film by Sputtering;MRS Proceedings;2004

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