Dynamics of Silicon Particles in DC Silane Plasmas Transported by a Modulated Magnetic Field-Reference-Cited by-同舟云学术

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Dynamics of Silicon Particles in DC Silane Plasmas Transported by a Modulated Magnetic Field

Published:1994-07-30 Issue:Part 1, No. 7B Volume:33 Page:4216-4220
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Fujiyama Hiroshi,Kawasaki Hiroharu,Yang Sung-Chae,Matsuda Yoshinobu

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

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