Vibration Analysis and Transmission Characteristics of Piezoelectric Micromachined Ultrasonic Transducers Using Epitaxial Pb(Zr,Ti)O$_{3}$ Thin Films on $\gamma$-Al$_{2}$O$_{3}$/Si Substrate-Reference-Cited by-同舟云学术

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Vibration Analysis and Transmission Characteristics of Piezoelectric Micromachined Ultrasonic Transducers Using Epitaxial Pb(Zr,Ti)O$_{3}$ Thin Films on $\gamma$-Al$_{2}$O$_{3}$/Si Substrate

Published:2012-11-20 Issue: Volume:51 Page:11PA04
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Akai Daisuke,Ozaki Katsuya,Numata Yasuyuki,Suzuki Keisuke,Okada Nagaya,Ishida Makoto

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ideal Sensor Chips —A Smart Microsensor Chip with LSI and MEMS Process and Materials—;Sensors and Materials;2018-12-10

2. Epitaxial PMnN-PZT/Si MEMS ultrasonic rangefinder with 2 m range at 1 V drive;Sensors and Actuators A: Physical;2017-10

3. Review of piezoelectric micromachined ultrasonic transducers and their applications;Journal of Micromechanics and Microengineering;2017-09-22

4. Characteristic analysis of diaphragm-type transducer that is thick relative to its size;JPN J APPL PHYS;2017

5. Characteristic analysis of diaphragm-type transducer that is thick relative to its size;Japanese Journal of Applied Physics;2017-06-22

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