Pattern Transfer Characterization after Double-Level Lithography for a Fabrication of the Three-Dimensional Aluminum Titanium Carbide Air Bearing Surface of the Hard Disk Slider
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Published:2012-06-20
Issue:
Volume:51
Page:06FF08
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Pholprasit Patama,Atthi Nithi,Thammabut Thawat,Jeamsaksiri Wutthinan,Hruanun Charndet,Poyai Amporn,Silapunt Rardchawadee
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering