An Evaluation of High Acceleration Voltage Electron Beam Writing on X-Ray Masks
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Published:1998-05-15
Issue:Part 1, No. 5A
Volume:37
Page:2445-2450
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Kise Koji,Aya Sunao,Yabe Hideki,Kitamura Kaeko,Marumoto Kenji
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering