Fundamental Studies on Scanning Electron-Beam Dielectric Microscopy
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Published:1998-09-30
Issue:Part 1, No. 9B
Volume:37
Page:5349-5352
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Cho Yasuo,Yamanouchi Kazuhiko
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering