Author:
Watanabe Seiichi,Tamura Hitoshi,Sumiya Masahiro,Furuse Muneo,Kawasaki Sunao
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
2 articles.
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1. An ECR ion source directly excited in a selected microwave mode cavity resonator for material processing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2005-08
2. Mechanism of the Production of Concentric Spread Plasma;Japanese Journal of Applied Physics;2001-02-15