1. State Key Laboratory of Quantum Optics and Quantum Optics Devices, College of Physics and Electronics Engineering, Shanxi University, Taiyuan 030006, China
2. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
3. Nano-optoelectronics Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China