Damage to Nb3Ge Films during CF4Cleaning
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Published:1984-11-20
Issue:Part 1, No. 11
Volume:23
Page:1536-1536
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Kato Yujiro,David Bernd,Rogalla Horst
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering