Mass Spectrometry Ion Sampling on the Positive Column DC Discharge Plasmas
-
Published:1983-10-20
Issue:Part 1, No. 10
Volume:22
Page:1577-1581
-
ISSN:0021-4922
-
Container-title:Japanese Journal of Applied Physics
-
language:en
-
Short-container-title:Jpn. J. Appl. Phys.
Author:
El-Kelish Salah,Hattori Shuzo
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Mechanistic studies of oxygen plasma etching;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1988-11