Measurement of Magnesium Oxide Sputtering Yields by He and Ar Ions with a Low-Energy Mass-Selected Ion Beam System-Reference-Cited by-同舟云学术

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Measurement of Magnesium Oxide Sputtering Yields by He and Ar Ions with a Low-Energy Mass-Selected Ion Beam System

Published:2007-11-22 Issue:No. 46 Volume:46 Page:L1132-L1134
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Hine Kiyohiro,Yoshimura Satoru,Ikuse Kazumasa,Kiuchi Masato,Hashimoto Jun,Terauchi Masaharu,Nishitani Mikihiko,Hamaguchi Satoshi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference7 articles.

1. Theory of the lifetime of the MgO protecting layer in ac plasma display panels

2. Ion and neutral energy distributions to the MgO surface and sputtering rates in plasma display panel cells

3. Low-energy xenon ion sputtering of ceramics investigated for stationary plasma thrusters

4. Fragment Ions of Dimethylsilane Produced by Hot Tungsten Wires

5. Measurement of Au Sputtering Yields by Neon with Low-Energy Mass Analyzed Ion Beam System

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1. Simulating the Effect of Field Electron Emission from a Cathode with a Thin Dielectric Film on Its Sputtering in a Gas Discharge in an Argon and Mercury Vapor Mixture;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2024-04

2. Modeling of the influence of field electron emission from a cathode with a thin insulating film on its sputtering in a gas discharge in a mixture of argon and mercury vapor;Поверхность. Рентгеновские, синхротронные и нейтронные исследования;2024-03-15

3. Monte Carlo Simulation of Alkaline Earth Metal Oxides Protective Layers Bombarded With Ne⁺ or Xe⁺ in Plasma Display Panels;IEEE Transactions on Plasma Science;2023-03

4. 基于蒙特卡罗方法的离子束溅射熔融石英、硅、金和铜行为特征规律仿真研究;Laser & Optoelectronics Progress;2023

5. Foundations of atomic-level plasma processing in nanoelectronics;Plasma Sources Science and Technology;2022-10-01

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