Real-Time Diagnosis of Nano-Sized Contaminant Particles Generated in TiN Metal Organic Chemical Vapor Deposition
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/2/i=3/a=035501/pdf
Reference16 articles.
1. TiCN: A new chemical vapor deposited contact barrier metallization for submicron devices
2. Feature scale simulation of selective chemical vapor deposition process
3. Effect of the Gas‐Phase Reaction in Metallorganic Chemical Vapor Deposition of TIN from Tetrakis(dimethylamido)titanium
4. A study on the real-time decomposition monitoring of a metal organic precursor for metal organic chemical vapor deposition processes
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