Gap Servo System for a Biaxial Device Using an Optical Gap Signal in a Near Field Readout System-Reference-Cited by-同舟云学术

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Gap Servo System for a Biaxial Device Using an Optical Gap Signal in a Near Field Readout System

Published:2003-05-15 Issue:Part 1, No. 5A Volume:42 Page:2719-2724
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ishimoto Tsutomu,Saito Kimihiro,Shinoda Masataka,Kondo Takao,Nakaoki Ariyoshi,Yamamoto Masanobu

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/42/i=5R/a=2719/pdf

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