Two-step Process for the Metalorganic Chemical Vapor Deposition Growth of High Quality AlN Films on Sapphire
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/42/i=4R/a=1590/pdf
Cited by 41 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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2. Recent advances and challenges in AlGaN-based ultra-violet light emitting diode technologies;Materials Research Bulletin;2021-08
3. Temperature Dependence of Stress and Optical Properties in AlN Films Grown by MOCVD;Nanomaterials;2021-03-10
4. Direct observation of an electrically degenerate interface layer in a GaN/sapphire heterostructure;Nanoscale;2019
5. Photo-Enhanced Acid Chemical Etching of High-Quality Aluminum Nitride Grown by Metal-Organic Chemical Vapor Deposition;ECS Journal of Solid State Science and Technology;2019
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