Surface Segregation of CaF2in Thin Si(111)/CaF2/Si Multilayers Studied by Total Electron Yield Spectroscopy andIn situEllipsometry
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Published:2005-07-08
Issue:7A
Volume:44
Page:5171-5177
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Ejima Takeo,Ohuchi Katsumi,Watanabe Makoto
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering